A study on the high rate deposition of CrNx films with controlled microstructure by magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference17 articles.
1. High rate deposition by vacuum arc methods
2. High-current arc—a new source for high-rate deposition
3. High‐rate magnetron sputtering
4. High-rate reactive d.c. magnetron sputtering of ZrOx coatings
5. High-rate reactive sputtering of yttria-stabilized zirconia using pulsed d.c. power
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