Author:
Mori T.,Fukuda S.,Takemura Y.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference4 articles.
1. Thin-film deposition;Smith,1995
2. Physics of Thin Films;Francombe,1994
3. Reactive-sputter-deposited TiN films on glass substrates
4. Deformation Processing, Chap. 4;Backofen,1972
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