Author:
Dekempeneer E.H.A.,Poirier L.,Lebrun J.P.,Pasgrimaud A.,Desalos Y.,Balanck F.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference12 articles.
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3. Formation of TiN films with low Cl concentration by pulsed plasma chemical vapor deposition
4. Application of wear-resistant PACVD coatings in aluminium diecasting: economical and ecological aspects
5. Recent advances in plasma diffusion processes
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