Author:
Kaiser M.,Urban H.,Emmerich R.,Elsner P.,Baumgärtner K.-M.,Räuchle E.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference17 articles.
1. Fundamentals of Plasma Chemistry and Technology;Boening,1988
2. Plasma Polymerisation;Yasuda,1985
3. Treatment and Etching of Polymers;d'Agostino,1990
4. Polymer Surfaces, From Physics to Technology;Garbassi,1994
5. Reactive ion etching of silicon using bromine containing plasmas
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献