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Application of the ECR slot antenna plasma source for ion implantation

  • Published:1997-09 Issue:2-3 Volume:93 Page:217-224
  • ISSN:0257-8972
  • Container-title:Surface and Coatings Technology
  • language:en
  • Short-container-title:Surface and Coatings Technology

Author:

Korzec D.,Raiko V.,Engemann J.,Günzel R.,Brutscher J.,Möller W.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference35 articles.

1. Carbonaceous surface layers deposited on TiN coatings by ion implantation;Franck;J. Vac. Sci. Technol. B,1994

2. Ion-beam-induced densification of sol-gel ceramic thin films;Levine;J. Vac. Sci. Technol. B,1994

3. Sheath thickness and potential profiles of ion-matrix sheaths for cylindrical and spherical electrodes;Conrad;J. Appl. Phys.,1987

4. Metal ion implantation: Conventional versus immersion;Brown;J. Vac. Sci. Technol. B,1994

5. Using SIMS to detect contamination sources from ion implanters;Stevie;Solid State Technol.,1995

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