Author:
Walker M.,Baumgärtner K.-M.,Kaiser M.,Lindenmaier S.,Räuchle E.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference10 articles.
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3. Elongated microwave electron cyclotron resonance heating plasma source
4. H. Gleich, O. Hoyer, E. Räuchle, G. Vollweiler, M. Walker, Eur. Patent 95 10 6495.5, 1995.
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