Applications of negative-ion beams
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference17 articles.
1. A heavy negative ion sputter source: Production mechanism of negative ions and their applications
2. Radio frequency plasma sputter type heavy negative ion source
3. Negative ion beam technology for materials science (invited)
4. Carbon negative ion implantation into silicon
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3. Silicon negative ion implantation induced vacancy defects in thermally grown SiO2 thin films;Radiation Effects and Defects in Solids;2020-05-05
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