Production of stable and metastable phases of zirconium nitrides by NH3 plasma nitridation and by double ion beam sputtering of zirconium films-Reference-Cited by-同舟云学术

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Production of stable and metastable phases of zirconium nitrides by NH3 plasma nitridation and by double ion beam sputtering of zirconium films

Published:2000-03 Issue:1-3 Volume:125 Page:100-105
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Straboni A.,Pichon L.,Girardeau T.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference13 articles.

1. Refractory metal nitride rectifying contacts on GaAs

2. Transition Metal Carbides and Nitrides;Toth,1971

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