Surface defects and arc generation in reactive magnetron sputtering of aluminium oxide thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference14 articles.
1. Voltage controlled reactive sputtering process for aluminium oxide thin films
2. Aspects and results of long-term stable deposition of Al2O3 with high rate pulsed reactive magnetron sputtering
3. Pulsed magnetron sputter technology
4. Corrosion studies with hard coating-substrate systems
5. Corrosion behavior of ion plated and implated films
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