Element composition and electrochemical behaviour of polycrystalline AlN thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials
2. A new protective AlN film for organic photoconductors
3. Deposition of AlN films onto Fe-Al-Mn alloys by reactive r.f. magnetron sputtering
4. Mechanical properties and oxidation—corrosion behavior of AlN-coated Fe-Al-Mn alloys
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1. Electrochemical Corrosion of Nano-Structured Magnetron-Sputtered Coatings;Coatings;2019-10-20
2. Microchanneled biomorphic AlN-coated Al2O3 by pressureless infiltration–nitridation;Ceramics International;2014-09
3. Deposition and characterization of c-axis oriented aluminum nitride films by radio frequency magnetron sputtering without external substrate heating;Thin Solid Films;2011-07
4. Micro-structural and optical properties of reactive magnetron sputtered Aluminum Nitride (AlN) nanostructured films;Current Applied Physics;2011-01
5. The preparation and characterization of preferred (110) orientation aluminum nitride thin films on Si (100) substrates by pulsed laser deposition;Vacuum;2010-08
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