Deposition of TiN layer on TiNi thin films to improve surface properties
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference28 articles.
1. Shape memory and related phenomena
2. The TiNi shape-memory alloy and its applications for MEMS
3. TiNi (shape memory) films silicon for MEMS applications
4. Thin film shape memory alloy microactuators
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