Author:
Carrera S,Salas O,Moore J.J,Woolverton A,Sutter E
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference11 articles.
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4. The influence of magnetron configuration on ion current density and deposition rate in a dual unbalanced magnetron sputtering system
5. Unbalanced dc magnetrons as sources of high ion fluxes
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