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Dynamic-sasamal: simulation software for high-dose ion implantation

  • Published:2002-09 Issue: Volume:158-159 Page:87-93
  • ISSN:0257-8972
  • Container-title:Surface and Coatings Technology
  • language:en
  • Short-container-title:Surface and Coatings Technology

Author:

Miyagawa Y.,Nakadate H.,Djurabekova F.,Miyagawa S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Historical review of computer simulation of radiation effects in materials;Journal of Nuclear Materials;2019-07

2. Effect of proton irradiation on the friction and wear properties of polyimide;Wear;2014-08

3. Characterisation of FIB milling yield of metals by SEM stereo imaging technique;Microelectronic Engineering;2009-04

4. Molecular dynamics simulations of the initial stages of sputter erosion of a metal overlayer system: 2keV Ar→Cu/Ni(100);Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-01

5. Classical dynamics simulation of the fluence dependence of sputtering properties for the 2 keV Cu→Cu(100) system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-09
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