Microstructure evolution of AlN films deposited under various pressures by RF reactive sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference23 articles.
1. Structural characterization of pulsed laser-deposited AlN thin films on semiconductor substrates
2. AIN thin film deposition by pulsed laser ablation of Al in NH3
3. Preparation of Aluminum Nitride Epitaxial Films by Electron Cyclotron Resonance Dual-Ion-Beam Sputtering
4. Effect of beam voltage on the properties of aluminium nitride prepared by ion beam assisted deposition
5. Aluminium nitride films prepared by reactive magnetron sputtering
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