Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference81 articles.
1. (Ed.). Handbook of Plasma Immersion Ion Implantation and Deposition;Anders,2000
2. Plasma Immersion Ion Implantation (PIII);Rej,1996
3. Two-dimensional modeling and simulation for dynamic sheath expansion during plasma immersion ion implantation
4. Fundamentals of plasma immersion ion implantation;Wood,2000
5. Spatial and temporal growth and collapse in a PBII plasma
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