Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers-Reference-Cited by-同舟云学术

Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers

Published:1998-10 Issue: Volume:108-109 Page:391-397
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Rajan N,Zorman C.A,Mehregany M,DeAnna R,Harvey R.J

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference9 articles.

1. A. Singh, M. Mehregany, S. Phillips, R. Harvey, M. Benjamin, in: K. Sato S. Shoji (Eds.), Proceedings of the 9th Annual International Workshop on Microelectromechanical Systems, IEEE, 1996, p. 473.

2. N. Rajan, C.A. Zorman, M. Mehregany, R. DeAnna, R.J. Harvey, in: K. Najafi (Ed.), Proceedings of the 10th Annual Workshop on Microelectromechanical Systems, IEEE, 1997, p. 165.

3. Measurement of wear in polysilicon micromotors

4. Micromechanical characterization of chemically vapor deposited ceramic films

5. A study of wear on MEMS contact morphologies

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Deep Etching of LiNbO3 Using Inductively Coupled Plasma in SF6-Based Gas Mixture;Journal of Microelectromechanical Systems;2021-02

2. Deep reactive ion etching;Handbook of Silicon Based MEMS Materials and Technologies;2020

3. Thermal Flow Sensors for Harsh Environments;Sensors;2017-09-08

4. Conformal growth of low friction HfBxCy hard coatings;Thin Solid Films;2015-10

5. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2015