Plasma assisted CVD for low temperature coatings to improve the wear and corrosion resistance
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference21 articles.
1. Tailored Organometallics as Low-Temperature CVD Precursors to Thin Films
2. New developments in the field of superhard coatings
3. Investigation of PA-CVD of TiN: Relations between process parameters, spectroscopic measurements and layer properties
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