Topography and lattice strain development on patterned Si surfaces

Author:

Blakely J.M.,Umbach C.C.

Publisher

Elsevier BV

Subject

Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science

Reference34 articles.

1. Finite temperature phase diagram of vicinal Si(100) surfaces;Alerhand;Phys. Rev. Lett.,1990

2. Blakely, L., Umbach, C., Tanaka, S., 1997. Atomic steps in the decay of 1- and 2-dimensional gratings. In: Dynamics of Crysta1 Surfaces and Interfaces, Duxbury, P. M and Pence, T. J. (eds.), Plenum Press, New York. pp. 2339.

3. The growth of crystals and the equilibrium structure of their surfaces;Burton;Phil. Trans. R. Soc.,1951

4. Atomic and electronic structures of reconstructed Si(100) surfaces;Chadi;Phys. Rev. Lett.,1979

5. Stabilities of singlelayer and bilayer steps on Si(001) surfaces;Chadi;Phys. Rev. Lett.,1987

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