Author:
Bugrov G.E,Kondranin S.K,Kralkina E.A,Pavlov V.B,Savinov D.V,Vavilin K.V,Lee Heon-Ju
Subject
General Physics and Astronomy,General Materials Science
Reference6 articles.
1. Operation of Broad-Beam Sources;Kaufman,1987
2. Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions,1990
3. Ion Source Design for Industrial Applications
4. http://www.orc.ru/~platar/ PLATAR Ltd., 24.05.2000
Cited by
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