Optimization of SiNx layer for solar cell using computational method
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference7 articles.
1. Study of the composition of hydrogenated silicon nitride SiNx:H for efficient surface and bulk passivation of silicon
2. Bulk and surface passivation of silicon solar cells accomplished by silicon nitride deposited on industrial scale by microwave PECVD
3. High-quality surface passivation of silicon solar cells in an industrial-type inline plasma silicon nitride deposition system
4. Bulk passivation of multicrystalline silicon solar cells induced by high-rate-deposited (> 1 nm/s) silicon nitride films
5. Investigation of the properties of plasma-enhanced chemical vapor deposited silicon nitride and its effect on silicon surface passivation
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