An integrated Mach–Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference12 articles.
1. Optical biosensor microsystems based on the integration of highly sensitive Mach–Zehnder interferometer devices
2. On-Chip Integrated Mid-Infrared GaAs/AlGaAs Mach–Zehnder Interferometer
3. Fast, Ultrasensitive Virus Detection Using a Young Interferometer Sensor
4. Interferometric biosensor based on planar optical waveguide sensor chips for label-free detection of surface bound bioreactions
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