Determination of electron energy probability function in low-temperature plasmas from current – Voltage characteristics of two Langmuir probes filtered by Savitzky–Golay and Blackman window methods-Reference-Cited by-同舟云学术

Determination of electron energy probability function in low-temperature plasmas from current – Voltage characteristics of two Langmuir probes filtered by Savitzky–Golay and Blackman window methods

Published:2015-10 Issue:10 Volume:15 Page:1173-1183
ISSN:1567-1739
Container-title:Current Applied Physics
language:en
Short-container-title:Current Applied Physics

Author:

Roh Hyun-Joon,Kim Nam-Kyun,Ryu Sangwon,Park Seolhye,Lee Seok-Hwan,Huh Sung-Ryul,Kim Gon-Ho

Funder

Brain Korea 21 Plus Project

Ministry of Science, ICT & Future Planning

National Research Foundation of Korea (NRF)

Publisher

Elsevier BV

Subject

General Physics and Astronomy,General Materials Science

Reference16 articles.

1. Nonequilibrium EEDF in gas discharge plasmas

2. Stochastic heating in asymmetric capacitively coupled RF discharges

3. Electron energy distribution functions and the influence on fluorocarbon plasma chemistry

4. Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

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