Design and manufacturing of micro heaters for gas sensors-Reference-Cited by-同舟云学术

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Design and manufacturing of micro heaters for gas sensors

Published:2006 Issue: Volume: Page:117-121
ISSN:
Container-title:4M 2006 - Second International Conference on Multi-Material Micro Manufacture
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Author:

Johander Per,Goenaga Igor,Gomez David,Moldovan Carmen,Nedelcu Oana,Petkov Petko,Kaufmann Ulrike,Ritzhaupt-Kleissl Hans-Joachim,Dorey Robert,Persson Katrin

Publisher

Elsevier

Reference8 articles.

1. Mixed technologies for gas sensors microfabrication;Moldovan,2005

2. Tin oxide Gas Sensor fabricated using CMOS micro-hotplates and in situ processing;Shuehl;IEEE Electron Devices Lett.,1993

3. Heat Sources for Thick-Film and LTCC Thermal Microsystems;Zawada,2003

4. Microhotplate platforms for Chemical Sensor Research;Semancik;Sensor and Actuators,2001

5. Welch, “Micro-Machined Thin Film Hydrogen Gas Sensors” Proceedings 2002 US DOE Hydrogen Program Review NREL/CP-610–32405.

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