Author:
Kazemi Arash,Vatankhah Ramin,Farid Mehrdad
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Civil and Structural Engineering
Reference39 articles.
1. RF MEMS and their applications;Varadan,2003
2. Sealed-cavity resonant microbeam pressure sensor;Burns;Sens Actuat A,1995
3. Pull-in time dynamics as a measure of absolute pressure;Gupta,1997
4. Resonant-microbridge vapor sensor;Howe;IEEE Trans Electron Devices,1986
5. Nonlocal problems in MEMS device control;Pelesko;J Eng Math,2001
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