A modeling and analysis of spring-shaped torsion micromirrors for low-voltage applications

Author:

Huang J.-M.,Liu A.Q.,Deng Z.L.,Zhang Q.X.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Civil and Structural Engineering

Reference32 articles.

1. Micromechanical switches fabricated using nickel surface micromachining;Zavracky;Journal of Microelectromechanical Systems,1997

2. Electrostatic micro torsion mirrors for an optical switch matrix;Toshiyoshi;Journal of Microelectromechnical Systems,1996

3. Wavelength add-drop switching using tilting micromirrors;Ford;Journal of Lightwave Technology,1999

4. Silicon-micromachined scanning confocal optical microscope;Dickensheets;Journal of Microelectromechnical Systems,1998

5. Hornbeck LJ. Spatial light modulator and method. US Patent 5 061 049, 1991.

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