Cutting of thin metal films with a CO2-gas laser beam-Reference-Cited by-同舟云学术

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Cutting of thin metal films with a CO2-gas laser beam

Published:1968-11 Issue:4 Volume:7 Page:305-311
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Siekman J.G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Proc. 3rd Symp. Electron Beam Technol.;Steigerwald,1961

2. Proc. 3rd Symp. Electron Beam Technol.;Wells,1961

3. Electron beams in microelectronics;Wells,1962

4. Experiments on the low-voltage machining of thin films

5. HIGH‐OUTPUT POWERS AND LONG LIFETIMES OF SEALED‐OFF CO2LASERS

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3. Interaction of laser radiation with solid materials and its significance to analytical spectrometry. A review;Journal of Analytical Atomic Spectrometry;1993

4. Laser trimming of NiCr thin film resistors I: Thin film resistors without a protective layer;Thin Solid Films;1989-12

5. Materials Processing;Laser Processing and Analysis of Materials;1983

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