Author:
Hashimoto Chisato,Nakajima Shigeru
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. CMOS Test Chip Design for Process Problem Debugging and Yield Prediction Experiments;Lukaszek;Solid State Technol.,1986
2. The Spidermask: A New Approach for Yield Monitoring Using Product Adaptable Test Structures;Beckers,1990
3. Diagnostic Measurements in LSI/VLSI Integrated Circuits Production;Jakubowski,1991
4. Methodology of Process Evaluation with Wafer-mapping Techniques for Statistical Process Control;Takeda,1994
5. Method for Semiconductor Process Optimization Using Functional Representations of Spatial Variations and Selectivity;Mozumder;IEEE Trans. Comp., Hybrids, Manuf. Technol.,1992