Enhanced double patterning decomposition using lines encoding-Reference-Cited by-同舟云学术

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Enhanced double patterning decomposition using lines encoding

Published:2016-09 Issue:2 Volume:3 Page:210-216
ISSN:2314-7172
Container-title:Journal of Electrical Systems and Information Technology
language:en
Short-container-title:Journal of Electrical Systems and Information Technology

Author:

Soradi Khaled M.,Darwish Nevin M.

Publisher

Springer Science and Business Media LLC

Subject

General Medicine

Reference10 articles.

1. Design Enablement and Design-Centric Assessment of Future Semiconductor Technologies;Abou Ghaida,2010

2. 45nm high-k+ metal gate strain-enhanced transistors;Auth,2008

3. Layout decomposition and legalization for double-patterning technology;Ghaida;IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.,2013

4. A Novel Line Encoding Technique for Pattern Matching, Engineering Research Journal;Ibraheem,2015

5. Seeing double;Mack;IEEE Spectr.,2008

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1. Fast Polygons Proximity Detection for ICs Multiple Patterning Lithography;2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus);2021-01-26

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