Author:
de Zwart S.T.,Fried T.,Boerma D.O.,Hoekstra R.,Drentje A.G.,Boers A.L.
Subject
Materials Chemistry,Surfaces and Interfaces,Surfaces, Coatings and Films,Condensed Matter Physics
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1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
2. Sputtering by Particle Bombardment I;Sigmund,1981
3. Proc. Intern. Conf. on Atomic Collision Phenomena in Solids;Parilis,1970
Cited by
2 articles.
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