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Electron-beam-induced direct etching of graphene

Published:2013-11 Issue: Volume:64 Page:84-91
ISSN:0008-6223
Container-title:Carbon
language:en
Short-container-title:Carbon

Author:

Thiele Cornelius,Felten Alexandre,Echtermeyer Tim J.,Ferrari Andrea C.,Casiraghi Cinzia,v. Löhneysen Hilbert,Krupke Ralph

Funder

Karlsruhe Nano Micro Facility (KNMF)

Helmholtz Research Infrastructure at Karlsruhe Institute of Technology

Alexander von Humboldt Foundation

NANOPOTS

RODIN and GENIUS

Royal Society Wolfson Research Merit Award and the Cambridge Nokia Research Centre

Publisher

Elsevier BV

Subject

General Chemistry,General Materials Science

Reference40 articles.

1. Crystallographic etching of few-layer graphene;Datta;Nano Lett,2008

2. Energy band-gap engineering of graphene nanoribbons;Han;Phys Rev Lett,2007

3. Detection of individual gas molecules adsorbed on graphene;Schedin;Nat Mater,2007

4. Chaotic dirac billiard in graphene quantum dots;Ponomarenko;Science,2008

5. Tunable Coulomb blockade in nanostructured graphene;Stampfer;Appl Phys Lett,2008

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1. A review of two-dimensional porous graphene with in-plane pores: Pore construction and membrane applications;Carbon;2024-10

2. Electron-beam chemistry in graphene - Effect of environmental SEM parameters on patterning and defect engineering;Vacuum;2023-01

3. Effects on graphene of electron irradiation at 25 keV and dosages up to 10¹⁸ electrons/cm²;Journal of Vacuum Science & Technology A;2023-01

4. From Top to Down—Recent Advances in Etching of 2D Materials;Advanced Materials Interfaces;2022-09-16

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