Interpretation of X-ray photoelectron spectra of carbon-nitride thin films: New insights from in situ XPS
Author:
Funder
Swedish Research Council (VR) Linnaeus Environment LiLi-NFM on Nanoscale Functional Materials
Publisher
Elsevier BV
Subject
General Chemistry,General Materials Science
Reference39 articles.
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5. Role of nitrogen in the formation of hard and elastic CNx thin films by reactive magnetron sputtering;Hellgren;Phys. Rev. B,1999
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