Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion-Reference-Cited by-同舟云学术

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Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion

Published:2017-03 Issue: Volume:113 Page:192-204
ISSN:0008-6223
Container-title:Carbon
language:en
Short-container-title:Carbon

Author:

Ubnoske Stephen M.^ORCID,Radauscher Erich J.^ORCID,Meshot Eric R.,Stoner Brian R.,Parker Charles B.,Glass Jeffrey T.

Funder

Advanced Research Projects Agency - Energy

Basic Energy Sciences

Lawrence Livermore National Laboratory

U.S. Department of Energy

National Science Foundation

Office of Science

Publisher

Elsevier BV

Subject

General Chemistry,General Materials Science

Reference80 articles.

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2. Field-emitter arrays for vacuum microelectronics. Electron Devices;Spindt;IEEE Trans.,1991

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4. Vacuum microelectronics: what's new and exciting. Electron Devices;Utsumi;IEEE Trans.,1991

5. Introducing the vacuum transistor: a device made of nothing;Han;IEEE Spectr.,2014

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