Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film-Reference-Cited by-同舟云学术

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Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

Published:2020-12 Issue: Volume:170 Page:294-301
ISSN:0008-6223
Container-title:Carbon
language:en
Short-container-title:Carbon

Author:

Zhang Zilong^ORCID,Sang Liwen^ORCID,Huang Jian,Chen Waiyan,Wang Linjun,Takahashi Yukiko,Mitani Seiji^ORCID,Koide Yasuo,Koizumi Satoshi,Liao Meiyong

Funder

JSPS KAKENHI

Tsukuba Global Innovation Promotion Agency, Science

National Natural Science Foundation of China

Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan

Publisher

Elsevier BV

Subject

General Chemistry,General Materials Science

Reference45 articles.

1. Diamond in perspective: a review of mechanical properties of natural diamond;Brookes;Diam. Relat. Mater.,1991

2. Single-crystal diamond microelectromechanical resonator integrated with a magneto-strictive galfenol film for magnetic sensing;Zhang;Carbon,2019

3. Mechanical properties of synthetic type IIa diamond crystal;Sumiya;Diam. Relat. Mater.,1997

4. Nanocrystalline diamond-glass platform for the development of three-dimensional micro-and nanodevices;Janssens;Diam. Relat. Mater.,2019

5. Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond;Olivero;Adv. Mater.,2005

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2. One-dimensional diamond nanostructures: Fabrication, properties and applications;Carbon;2024-04

3. Single-Crystal Diamond MEMS Magnetic Sensor;Topics in Applied Physics;2024

4. Alumina intercalation to enhance the performance of BAW magnetic sensors: Micromagnetic and finite element analysis;Sensors and Actuators A: Physical;2023-12

5. Diamond MEMS: From Classical to Quantum;Advanced Quantum Technologies;2023-08-29

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