Low temperature synthesis of diamond thin films through graphite etching in a microwave hydrogen plasma
Author:
Publisher
Elsevier BV
Subject
General Chemistry,General Materials Science
Reference15 articles.
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3. Low temperature CVD diamond deposition using halogenated precursors—deposition on low melting materials: Al, Zn and glass;Schmidt;Diamond Relat Mater,2001
4. Low temperature diamond growth using CO2/CH4 plasmas: molecular beam mass spectrometry and computer simulation investigations;Petherbridge;J Appl Phys,2001
5. Real time spectroellipsometry for optimization of diamond film growth by microwave plasma-enhanced chemical vapor deposition from CO/H-2 mixtures;Lee;J Appl Phys,1996
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