Ionized Cluster Beam Deposition and Epitaxy

Author:

Takagi Toshinori

Publisher

Elsevier

Reference63 articles.

1. T. Takagi, I. Yamada, M. Kunori, and S. Kobiyama, Proc. Int. Conf. Ion Sources, 2nd, 1972 790, (1973).

2. T. Takagi, K. Matsubara, H. Takaoka, and I. Yamada, Proc.—Int. Conf. Ion Plat. Allied Tech., 2nd, 1979 174 (1979).

3. Role of ions in ion-based film formation

4. C. Weissmantel, Proc. Int. Vac. Congr., 7th, 1977 1533 (1977).

5. The effect of ion irradiation on the adherence of germanium films

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