Author:
Jones Richard G.,Yoon Sangwoong,Nagasaki Yukio
Subject
Polymers and Plastics,Materials Chemistry,Organic Chemistry
Reference12 articles.
1. Paul S. In: Allen G, Bevington JC, editors. Comprehensive polymer science, vol 6. Oxford, UK: Pergamon Press, 1989:149; Fouassier JP, Rabek JF, editors. Radiation curing in polymer science and technology. London: Elsevier Applied Science, 1993, and references therein.
2. Hirai T, Hatano Y, Nonogaki SJ. Electrochem Soc 1971;118:669; Taniguchi Y, Hatano Y, Shiraishi H, Horigome S, Nonagaki S, Noraoka K. Jpn J Appl Phys 1979;18:1143; Thompson LF, Ballantyne JP, Feit ED. J Vac Sci Technol 1975;12:1280.
3. Stewart KJ, Hatzakis M, Shaw JM, Seeger DE. J Vac Sci Technol B 1989;7:1734; Hatzakis M, Stewart KJ, Shaw JM, Rishton SA. J Electrochem Soc 1991;138:1076.
4. Simple model of the lithographic response of “Hatzakis” chemically-amplified resists
5. Electron beam resists based on oxirane functionalised polystyrenes
Cited by
30 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献