The ionization potential of NF 3 : a G3 computational study on the thermochemical properties of NF x and NF x + ( x =1–3)
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,Condensed Matter Physics,Biochemistry
Reference43 articles.
1. Encyclopedia of Inorganic Chemistry;Sisler,1994
2. Anisotropic etching of SiO2in low‐frequency CF4/O2and NF3/Ar plasmas
3. Reactions of photogenerated free radicals at surfaces of electronic materials
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5. Ab initio calculations to the reactions of CFm (m = 4−1) and NFn (n = 3−1) species with models of SiO2 surface structures
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