Etched facet and semiconductor/air DBR facet of a AlGaInP laser diode prepared by focused ion beam milling
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry
Reference11 articles.
1. Edge-emitting lasers with short-period semiconductor/air distributed Bragg reflector mirrors
2. Fabrication and performance of AlGaAs-GaAs distributed Bragg reflector lasers and distributed feedback lasers utilizing first-order diffraction gratings formed by a periodic groove structure
3. Low Threshold GaInAsP Lasers with Semiconductor/Air Distributed Bragg Reflector Fabricated by Inductively Coupled Plasma Etching
4. Reactive ion etching of deeply etched DBR-structures with reduced air-gaps for highly reflective monolithically integrated laser mirrors
5. Narrow-stripe distributed reflector lasers with first-order vertical grating and distributed Bragg reflectors
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Widely tunable coupled-cavity semiconductor laser;Applied Optics;2009-06-25
2. The effects of the focus ion beam milling process on the optical properties of semiconductor nanostructures;Nanotechnology;2009-06-02
3. Iodine enhanced focused-ion-beam etching of silicon for photonic applications;Journal of Applied Physics;2007-11-15
4. Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling and nanopolishing;SPIE Proceedings;2006-04-21
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