Topology optimization of MEMS resonators with target eigenfrequencies and modes-Reference-Cited by-同舟云学术

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Topology optimization of MEMS resonators with target eigenfrequencies and modes

Published:2022-01 Issue: Volume:91 Page:104352
ISSN:0997-7538
Container-title:European Journal of Mechanics - A/Solids
language:en
Short-container-title:European Journal of Mechanics - A/Solids

Author:

Giannini Daniele^ORCID,Aage Niels^ORCID,Braghin Francesco^ORCID

Funder

European Research Council

STMicroelectronics

Villum Fonden

Publisher

Elsevier BV

Subject

General Physics and Astronomy,Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference58 articles.

1. MEMS Vibratory Gyroscopes;Acar,2009

2. Material interpolation schemes in topology optimization;Bendsøe;Arch. Appl. Mech.,1999

3. Topology Optimization, Vol. 95, No. 26;Bendsoe,2004

4. Design and optimisation of microelectromechanical systems: a review of the state-of-the-art;Benkhelifa;Int. J. Des. Eng.,2010

5. Optimization of auxetic structures for MEMS applications;Bruggi,2016

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