Author:
Zhang Yangming,Yan Peng,Zhang Zhen
Funder
NSFC
China Fundamental Research Funds for the Central Universities
Tsinghua University Initiative Scientific Research Program
Specialized Research Fund for the Doctoral Program of Higher Education
Subject
Applied Mathematics,Control and Systems Engineering,Electrical and Electronic Engineering,Computer Science Applications,Instrumentation
Reference38 articles.
1. Lee DJ, Kim K, Lee KN, Choi HG, Park NC, Park YP, et al., Robust design of a novel three-axis fine stage for precision positioning in lithography. Proc Inst Mech Eng Part C: J Mech Eng Sci 2010;224(4):877–88.
2. Enlarged atomic force microscopy scanning scope;Sinno;Rev Sci Instr,2007
3. Atomic force microscope;Binnig;Phys Rev Lett,1986
4. Design, testing and precision control of a novel long-stroke flexure micropositioning system;Xu;Mech Mach Theory,2013
5. New flexure parallel-kinematic micropositioning system with large workspace;Xu;IEEE Trans Robot,2012
Cited by
28 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献