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Modeling and control of a novel X–Y parallel piezoelectric-actuator driven nanopositioner

  • Published:2015-05 Issue: Volume:56 Page:145-154
  • ISSN:0019-0578
  • Container-title:ISA Transactions
  • language:en
  • Short-container-title:ISA Transactions

Author:

Liu Pengbo,Yan Peng,Zhang Zhen,Leng Tongtong

Funder

NSFC

China Fundamental Research Funds for the Central Universities

Tsinghua University Initiative Scientific Research Program

Specialized Research Fund for the Doctoral Program of Higher Education

Publisher

Elsevier BV

Subject

Applied Mathematics,Control and Systems Engineering,Electrical and Electronic Engineering,Computer Science Applications,Instrumentation

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1. Design and disturbance rejection control of a piezoelectric nanopositioning stage;Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science;2023-04-01

2. Finite time stable inversion in discrete frequency domain: Accuracy analysis, improvement and application to wafer stage;ISA Transactions;2023-01

3. Microscopic vibration suppression for a high-speed macro-micro manipulator with parameter perturbation;Mechanical Systems and Signal Processing;2022-11

4. H Infinity Feedback Control of a Piezoelectric Micromanipulator with Actuator Saturation;2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2022-08-08

5. Realization and application of an improved multi-fold method for ultrasonic guided wave;Structures;2022-04
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