Subject
Applied Mathematics,Control and Systems Engineering,Electrical and Electronic Engineering,Computer Science Applications,Instrumentation
Reference30 articles.
1. Dynamic response of a cantilever in liquid near a solid wall;Naik;Sensors and Actuators A,2003
2. Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning;Rocha;Journal of Microelectromechanical Systems,2006
3. A low actuation voltage electrostatic actuator for RF MEMS switch applications;Chu;Journal of Micromechanics and Microengineering,2007
4. Robust PID-control design for an electrostatic micromechanical actuator with structured uncertainty;Vagia;IET journal of Control theory and Applications,2008
5. Zolotas A, Tzes A, Vagia M. Robust control design for an uncertain electrostatic micro-mechanical system via loop shaping in: Proceedings of the European Control Conference (ECC’ 07), Kos, Greece, July 2007, p. 389–394.
Cited by
14 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献