A new mechanism design of electro-magnetic actuator for a micro-positioner

Author:

Chen Mei-Yung,Tzeng Huan-Wen,Hung Shao-Kang

Publisher

Elsevier BV

Subject

Applied Mathematics,Control and Systems Engineering,Electrical and Electronic Engineering,Computer Science Applications,Instrumentation

Reference19 articles.

1. Sitti M, Hashimoto H. Two-dimensional fine particle positioning using a piezoresistive cantilever as a micro/nano-manipulator. In: 1999 IEEE international conference on robotics and automation, vol. 4. 1999. p. 2729–35

2. On the design of piezoelectric sensors and actuators;Luck;ISA Transactions,1998

3. Sliding-mode control of a nonlinear-input system: Application to a magnetically levitated fast-tool servo;Gutierrez;IEEE Transactions on Industrial Electronics,1998

4. Adaptive robust precision motion control of linear motors with negligible electrical dynamics: Theory and experiments;Xu;IEEE/ASME Transactions on Mechatronics,2001

5. Huang P-Y, Chen Y-Y, Chen M-S. Position-dependent friction compensation for ballscrew tables. In: Proceedings of the 1998 IEEE international conference on control applications, vol. 2. 1998. p. 863–7

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