Effect of helium partial pressure on DC-magnetron sputtering of Co–Cr films
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Effects of Pt seed layer and Ar pressure on magnetic and structural properties of sputtered CoNi/Pt multilayers
2. Effect of RF substrate bias on crystalline orientation of chromium and magnetic characteristics of 84% Co-16% Cr films
3. Bias Effect on Compositional Separation in Sputtered Co–Cr Films
4. The crystallography and texture of Co-based thin film deposited on Cr underlayers
5. J. Veldeman, H. Jia, M. Burgelman, MRM-81 (1998).
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2. Characterization of zinc oxide films deposited in helium–oxygen and argon–helium–oxygen atmospheres by sputtering;Thin Solid Films;2016-12
3. MICROSTRUCTURES AND MAGNETIC PROPERTIES OF COBALT THIN FILMS;Modern Physics Letters B;2008-12-20
4. Helium-charged titanium films deposited by direct current magnetron sputtering;Thin Solid Films;2005-05
5. Magnetic properties and microstructure of CoCr and CoCrTa thin films sputtered at high pressure on a PET substrate;Journal of Magnetism and Magnetic Materials;2001-01
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