Effect of nitrogen content on the microstructure and mechanical properties of CNx thin films
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Prediction of New Low Compressibility Solids
2. Structural properties and electronic structure of low-compressibility materials: β-Si3N4and hypothetical β-C3N4
3. Preparation of CN x -phases using plasma-assisted and hot filament chemical vapour deposition
4. Low-Compressibility Carbon Nitrides
5. Possibility of carbon nitride formation by low‐energy nitrogen implantation into graphite:Insituelectron spectroscopy studies
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