Nonspecular scattering from extreme ultraviolet multilayer coatings
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference31 articles.
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4. Specification of surface figure and finish in terms of system performance
5. Modeling the image quality of enhanced reflectance x-ray multilayers as a surface power spectral density filter function
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