Determination of layer structure in Mo/Si multilayers using soft X-ray reflectivity-Reference-Cited by-同舟云学术

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Determination of layer structure in Mo/Si multilayers using soft X-ray reflectivity

Published:2003-01 Issue: Volume:325 Page:272-280
ISSN:0921-4526
Container-title:Physica B: Condensed Matter
language:en
Short-container-title:Physica B: Condensed Matter

Author:

Modi M.H.,Lodha G.S.,Nayak M.,Sinha A.K.,Nandedkar R.V.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. Soft X-ray and Extreme Ultraviolet Radiation;Attwood,2000

2. Soft X-ray Optics;Spiller,1994

3. Platinum/carbon multilayer reflectors for soft-x-ray optics

4. Thermally induced structural modification in Pt/C X-ray multilayer mirrors fabricated by electron beam evaporation

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1. Comparison of thermal stability of Mo/Si multilayers with different crystallinities of Mo layers;Applied Optics;2023-03-24

2. Interface asymmetry in AlN/Ni and Ni/AlN interfaces: A study using resonant soft X-ray reflectivity;Applied Surface Science;2020-11

3. Improving Thickness Uniformity of Mo/Si Multilayers on Curved Spherical Substrates by a Masking Technique;Coatings;2019-12-12

4. Optical constants of off-stoichiometric aluminum oxide thin film in 6–20 nm soft-X-ray/extreme ultraviolet region;Japanese Journal of Applied Physics;2016-08-31

5. Analysis of buried interfaces in multilayer mirrors using grazing incidence extreme ultraviolet reflectometry near resonance edges;Applied Optics;2015-12-03

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