Ultraprecision Feed System Based on Walking Drive
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference7 articles.
1. Ultraprecision Machine Tool Equipped with a Giant Magnetostriction Actuator;Eda;Annals of the CIRP,1992
2. A New Micro-Cutting Device with High Stiffness and Resolution;Hara;Annals of the CIRP,1990
3. A Six Degree of Freedom Fine Motion Mask Stage for X-Ray Aligner;Kikuiri;Annal of the CIRP,1993
4. Walking Drive - A New Precision Feed Drive;Shamoto,1993
5. Experimental Research on the Linear Motor Micro-Feed Devices with High-Frequency Response, Long Travel and High Accuracy;Wang;Annals of the CIRP,1991
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