Scales vs. Laser Interferometers Performance and Comparison of Two Measuring Systems-Reference-Cited by-同舟云学术

Scales vs. Laser Interferometers Performance and Comparison of Two Measuring Systems

Published:1993 Issue:2 Volume:42 Page:753-767
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Kunzmann H.,Pfeifer T.,Flügge J.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference51 articles.

1. B.W. Petley Physical Constants and the SI, NPL News, Jan. 1987

2. Fundamentals of Optics;Jenkins,1976

3. NN Canon - Laserlinear encoder

4. Technology and Application of Grating Interferometers in High-precision Measurement, Progress in Prec. Engg., Proc. of the 6th IPES/2nd UME;Teimel,1991

Cited by 90 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and Implementation of Precise Position Control for High-Power Stepper Motors and Grating Rulers Based on STM32;Journal of Physics: Conference Series;2024-06-01

2. Comparison of full fiber coupled interferometer systems under vacuum conditions;tm - Technisches Messen;2024-04-17

3. Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder;International Journal of Automation Technology;2024-03-05

4. A resolution improvement of measuring the pitch deviation of a diffraction scale grating based on the change in angles of diffraction of diffracted beams;Journal of Advanced Mechanical Design, Systems, and Manufacturing;2024

5. Analysis of autocollimator measurement system based on quaternion algorithm for 6-DOF;Optical Metrology and Inspection for Industrial Applications X;2023-11-27