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Development of a 5-Axis Control Ultraprecision Milling Machine for Micromachining Based on Non-Friction Servomechanisms

  • Published:2000 Issue:1 Volume:49 Page:295-298
  • ISSN:0007-8506
  • Container-title:CIRP Annals
  • language:en
  • Short-container-title:CIRP Annals

Author:

Takeuchi Y.,Sakaida Y.,Sawada K.,Sata T.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference9 articles.

1. Micromachining Using Excimer Lasers;Tönshoff;Annals of the CIRP,1993

2. Microlinear Motion Bearing Produced by Anisotropic Etching of Silicon;Moronuki;Annals of the CIRP,1996

3. Weck, M., Fischer, S., 1997, Development of an Ultraprecision Milling Machine, Proc. 9th IPES and 4th UME, Braunschweig, 379–381.

4. Ultraprecision 3-D Micromachining of Glass;Takeuchi;Annals of the CIRP,1996

5. Manufacture of Micropropeller by Means of Ultraprecision Milling Machine;Takeuchi;Journal of Robotics and Mechatronics,1997

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